Myriad size conversion kits provide all necessary parts to convert various modules of a wafer track to another wafer size. These kits do not change the function of a processing module. 
System 6000 & 6000XL Size Conversion Kits 
 

Description	Part No.
Coater to 3-Inch (standard wafer chuck)	501-38144-01
Coater to 100mm (standard wafer chuck)	501-38144-02
Coater to 125mm (standard wafer chuck)	501-38144-03
Coater to 150mm (standard wafer chuck)	501-38144-04
Coater to 3-Inch (Teflon wafer chuck)	501-38144-09
Coater to 100mm (Teflon wafer chuck)	501-38144-10
Coater to 125mm (Teflon wafer chuck)	501-38144-11
Coater to 150mm (Teflon wafer chuck)	501-38144-12
Developer/Scrubber to 3-Inch (standard wafer chuck)	501-38144-05
Developer/Scrubber to 100mm (standard wafer chuck)	501-38144-06
Developer/Scrubber to 125mm (standard wafer chuck)	501-38144-07
Developer/Scrubber to 150mm (standard wafer chuck)	501-38144-08
Developer/Scrubber to 3-Inch (Teflon wafer chuck)	501-38144-13
Developer/Scrubber to 100mm (Teflon wafer chuck)	501-38144-14
Developer/Scrubber to 125mm (Teflon wafer chuck)	501-38144-15
Developer/Scrubber to 150mm (Teflon wafer chuck)	501-38144-16

Series LSI Track Size Conversion Kits (LSI) 
 

Description	Part No.
Coater to 3-Inch	501-34588-02
Coater to 100mm	501-34588-03
Coater to 125mm	501-34588-04
Developer to 3-Inch	501-34588-05
Developer to 100mm	501-34588-06
Developer to 125mm	501-34588-07
Scrubber to 3-Inch	501-34588-08
Scrubber to 100mm	501-34588-09
Scrubber to 125mm	501-34588-10

LSI Indexer Size Conversion Kits 
 

Description	Part No.
Indexer to 3-Inch	501-35871-01
Indexer to 100mm	501-35871-02
Indexer to 125mm	501-35871-03