LSI 45/60 Capacitive & Optical Wafer Sensor Retrofit Kits 
The LSI 45/60 series of track systems included air sensors as the standard method of detecting wafers. Although simple in design, these sensors historically fail and/or change calibration at a higher rate then new style capacitive and optical sensors. Air sensors also create vortex currents in laminar air flow that can steer particulate onto the wafer surface. Myriad now offers an alternative, direct replacement capacitive and optical wafer sensors LSI 45/60. They are field proven and are now the standard wafer sensors used on Myriad manufactured LSI 45/60 systems. 
 

Description	Part No.
LSI 60 Hot/Cool Plate Module Cap active Sensor Retrofit Kit	0004-00026
LSI 60 Hot/Cool Plate Module Fiber Optic Sensor Retrofit Kit	0004-00027
LSI 45 Indexer Capacitive Sensor Retrofit Kit	0004-00028
LSI 45 Process Module Optical Sensor Retrofit Kit	0004-00029
LSI 45/60 Oven Interface Ramp Capacitive Sensor Retrofit Kit	0004-00030

LSI 60 Aluminum Hot/Cool Plate Retrofit Kit 
The LSI 60 standard hot and cool plates were made with a copper core which was nickel plated. Although these plates provide good thermal characteristics, they are difficult to clean. And should the nickel wear down to expose copper, it can attack silicon and potentially damage the substrate and devices. Myriad offers a direct replacement hard-anodized aluminum hot and cool plates. These plates were designed for the 6000 and 6000XL generations of track systems and therefore have many years of field proven service. The anodized surface is easy to clean and provides improved temperature stability and uniformity then the original nickel/copper models. The retrofit kit includes one each hot & cool plate and matching system software. 
 

Description	Part No.
Hot/Cool Plate Retrofit Kit	0004-00036

LSI 45 Improved Coater Waste Bottle Holder Retrofit Kit 
The standard coater waste bottle holder used on the LSI 45 utilized a pivot type bottle rack that raised and lowered the waste bottles by means of a lever handle. This style of rack is prone to becoming bent and render it inoperative and/or cause the waste bottles to be improperly aligned with the drain system. This retrofit kit replaces this "raise/lower" type of rack with the slide in type used on the later generation 6000 & 6000XL coater systems. The waste bottle neck fits into a plate that slides into the lower portion of the exhaust/drain box and eliminates all of the raise/lower rack parts. 
 

Description	Part No.
Waste Bottle Holder Retrofit Kit	0004-00033

LSI 45 Backside Edge Bead Removal (EBR) Retrofit Kit 
The LSI Backside EBR kit provides a method to remove residual photoresist from the back side, edge and top side of the wafer via a solvent stream. Cleaning the backside of the wafer eliminates photoresist that can be transferred to the transport belts, hot & cool plates, and other pieces of fab equipment causing additional housekeeping as well as increased particulate. Removing the residual photoresist from the edge of the wafer eliminates sticking on other pieces of fab equipment, most notably wafer pre-alignment systems. The backside EBR will remove the photoresist edge bead and up to 3mm of photoresist from the topside of the wafer (depending on photoresist & solvent type). The retrofit kit provides all necessary components to convert one coater track and is available with or without a solvent supply canister. Note: Should more then 3mm be required for removal from the topside of the wafer, Myriad provides a Topside Resist Removal (TRR) retrofit kit. 
 

Description	Part No.
Backside EBR Kit without solvent supply canister	501-39154-05
Backside EBR Kit with solvent supply canister	501-39154-06

LSI 45 Top Side Resist Removal (TRR) Retrofit Kit 
This feature utilizes a small diameter solvent stream that can be positioned to remove top surface photoresist. The removal of resist in areas that will be contacted by topside wafer clamping methods used on various types of processing equipment, greatly reduces the possibility of particulate generation. The retrofit kit provides all necessary components to convert one coater track. 
 

Description	Part No.
Top Side Resist Removal Kit	0004-00043

LSI 45 Brushless Spin Motor Retrofit Kit 
The brush type motors that are standard on the LSI 45/60 can be upgraded to brushless spin motors of the same type that are used on Myriad's latest generation of spin processors (6000XL & Alpha XI). The kit contains the spin motor in a modified spindle assembly, new dc power supply, new process & spin drive I/O pcb's, and all cabling and hardware necessary for installation. 
 

Description	Part No.
For 2 Track Cabinets with 1 Track installed	501-38393-02
For 2 Track Cabinets with 2 Tracks installed	501-38393-03
For 3 Track Cabinets with 1 Track installed	501-38393-04
For 3 Track Cabinets with 2 Tracks installed	501-38393-05
For 3 Track Cabinets with 3 Tracks installed	501-38393-06

Emergency Shut Off Retrofit Kit 
This kit provides the emergency shut off capability to the LSI 45/60 

Description Part No. 
EMO Switch Kit 501-39305-01 

Series LSI Wafer Size Conversion Kits