|
|
Options to Enhance Your Mask Aligner
Myriad offers a number of innovative options to enahce your processing
capabilities. Ehance
your mask aligner with:
High Resolution
(HRz) Enhancement Options
U.V. Exposure
Systems & Power Supply Options
Optical Viewing Sytems
Tooling Options
|
High
Resolution (HRz) Enhancement Option
|
Zeiss Optics
|
-
350 watt light source
-
350 watt U.V. power supply
-
Zeiss optical viewing head
-
Zeiss binocular
-
Zeiss objectives
-
Motor driven X-Y and Theta micrometer controls
-
1/8 micron step wafer stage resolution
|
|
U.V.
Exposure Systems & Power Supply Options
|
 |
-
Tamarack Light Source (high intensity upgrade)
-
Constant Intensity Power Supply (with optical feedback)
-
HA-5 Power Supply (with adjustable wattage)
-
350 Watt Power Supply (constant wattage)
-
KP-3 Conversion (350 watt source cooling kit)
|
-
|
-
Color Monitor Viewing System
-
Tri-Op KVO Turret (includes additional set of split field objectives)
-
Zeiss Binocular (resolution enhancement)
-
Vari-Power Viewing (rotation transfer lens provides three different magnifications
at each optical position
-
IR Backside Alignment (mask align to metallized patterns on backside of
wafers)
|
-
Control Box
|
-
Autoload
(cassette-to-cassette)
-
Control Box (quickly and easily monitor and modify air pressure and vacuum
controls
-
Proximity Printing (extended mask life, eliminates bow and runout)
-
Specialty Tools (a number of these are available, please inquire)
|
|
