The Myriad Series LSI performs cassette-to-cassette automatic or single wafer manual mode scrub, photoresist coat, positive or negative develop and either dehydration, soft or hard bake on wafers up to five inches (125mm) in diameter. The major elements of the system, the LSI 45 spindle, and the LSI 60 hot/cool plate are modules that can be configured to meet any process requirement. 

Dispense, exhaust and electronics modules that support these elements mount either inside or outside the cabinet. Adding complimentary modular hardware such as load/unload and buffer indexers, direction reversing turnabouts and exposure tool interfaces creates a complete wafer processing system. With the LSI 45/60, uniform lot to lot performance is the rule. 
 

Process Control 
Every part of the LSI Series provides high performance and precise control of every event, step by step. 
Precision dispense systems and spin-motor controls, combined with highly repeatable bake temperatures, result in superior process control. 

The hot/cool plate offers a time-proven bake technique along with an actively controlled cooling rate for high process repeatability. Controlled cooling eliminates the uncertainties inherent in cooling under ambient conditions. With the LSI 60 hot/cool plate, variations in airflow, humidity and fab ambient temperature have no effect on baking. 
 

Contamination Control 
The tubular frame construction of the LSI Series takes full advantage of laminar air flow systems to protect wafers from airborne contaminants; thus assuring higher wafer yield. The LSI 45 drain & exhaust system provides independent, adjustable exhaust flow and drain for each track. 
 

Independent Tracks 
Operations on each track are independent of the operations on every other track. In addition, power supplies for each track are independently switched so that one track can be removed while others continue to operate. 
All tracks interface to a shared central processing unit for centralized control. The microcomputer stores up to 19 process recipes that can be used on any or all tracks, independently or simultaneously. Battery backup retains programs during a power outage. 

The microcomputer also activates diagnostic routines that check for programming errors as well as hardware sensor status and all basic machine functions. It also identifies over 80 alarms and warnings. 
 

Modularity & Maintenance 
With its modular design, the LSI 45/60 offers configuration flexibility to solve tough logistics problems. Dispense systems, electronics modules and even exhaust systems can easily be removed from the cabinets for maintenance and service. Dispense and electronics modules can even be operated remote from the cabinet to further speed service, or to meet special installation demands. A sleeve in the exhaust system and disposable photoresist waste bottles simplify routine maintenance. 

To simplify installation, operation and maintenance of an LSI 45/60 system, separate areas are provided for facilities connection and pneumatic controls. 

Each process and bake module has handles for easy removal and replacement. Each modular track can operate outside the cabinet, for convenience in bench testing and troubleshooting. Electronic independence permits diagnostics, maintenance and repairs on one track while remaining tracks in the system continue to process wafers. 
 

LSI Series Configurations 
The modularity of the LSI Series equipment makes it easy to configure a system to meet any production need. LSI Series cabinets, available in a range of lengths, can house from one to four tracks. Even if only a single track is needed in the initial configuration, the cabinets are delivered equipped for future expansion. 
The LSI Series can be configured as four parallel systems, for automated in-line processing. Using the appropriate turnabouts, LSI Series tracks can also be arranged to provide multiple in-line process functions. A system can be directly interfaced with an aligner providing a complete scrub-bake-coat-bake cycle before the aligner and a develop-bake cycle after the aligner, all housed in a single cabinet. 

LSI Series Features 
* Up to 3 dispense pumps per track 
* Variety of pump options 
* Optional back side wash - edge bead removal system 
* Optional spray prime 
* Optional ambient temperature vapor prime module 

LSI 45 Developer 
* Negative, ambient or controlled temperature positive developer 
* Pump or pressure fluid supply systems 
* Back side rinse 

LSI 45 Wafer Scrub 
* High pressure (to 3000 PSI) jet scrub 
* Precise pressure brush scrub 

LSI 60 Hot/Cool Plate Bake 
* Vacuum contact or proximity bake functions 
* Highly accurate and reliable Platinum resistive thermal detectors (RTDs) 
* Real time temperature display 
* Temperature out-of-range alarm