System 6000XL Kits 

Point & Go (tm) Upgrade Kit 
The original Point & Go units that are currently installed in existing systems is based on a 286MPU architecture. Many components in the original systems are currently out of production. There is also the possibility that the bios used in these systems will not function properly in the year 2000. The Point & Go Upgrade Kit converts these systems to a new Pentium based computer system. The unit also includes a new style display panel and guided wave touch screen interface, expanded RAM & hard disk drive size, 3.5-inch floppy disk drive, and an upgraded software package. The Upgrade Kit is a complete unit that is "plug & play" compatible with the existing units. Full technical details are available by contacting Myriad. 
 

Description	Part No.
Point & Go (tm) Upgrade Kit	Point & Go (tm) Upgrade Kit  Contact Myriad for part number and price

Indexer Capacitive Wafer Sensor Retrofit Kit 
Replaces the optical wafer sensor with a capacitive sensor for use with silicon nitride wafers 
 

Description	Part No.
Standard Indexer	501-40481-01
3-Inch Indexer	501-40481-02

Process Module Beam Break Wafer Sensor Retrofit Kit 
Replaces the standard backside reflective optical sensor with a beam break type. These sensors eliminate wafer sensing problems encountered with silicon nitride wafers or wafers that have any backside coating that absorbs infrared light. 
 

Description	Part No.
Sensor Retrofit Kit 3-Inch Wafer	3850-0058-0001
Sensor Retrofit Kit 100mm Wafer	3850-0058-0002
Sensor Retrofit Kit 125mm Wafer	3850-0058-0003
Sensor Retrofit Kit 150mm Wafer	3850-0058-0004
Sensor Retrofit Kit with SST Module Cover, 3-Inch Wafer	3850-0057-0005
Sensor Retrofit Kit with SST Module Cover, 100mm Wafer	3850-0057-0006
Sensor Retrofit Kit with SST Module Cover, 125mm Wafer	3850-0057-0006
Sensor Retrofit Kit with SST Module Cover, 150mm Wafer	3850-0057-0006

Bake Module Beam Break Wafer Sensor Retrofit Kit 
Replaces the standard backside reflective optical sensor with a beam break type. These sensors eliminate wafer sensing problems encountered with silicon nitride wafers or wafers that have any backside coating that absorbs infrared light. 
 

Description	Part No.
Sensor Retrofit Kit (all wafer sizes)	3850-0069-0001
Sensor Retrofit Kit with SST Module Cover	3850-0056-0002

6000XL Top Side Edge Resist Removal (TRR) Retrofit Kit 
This feature utilizes a small diameter solvent stream that can be positioned to remove top surface photoresist. The removal of resist in areas that will be contacted by topside wafer clamping methods used on various types of processing equipment, greatly reduces the possibility of particulate generation. The retrofit kit provides all necessary components to convert one coater track. 
 

Description	Part No.
6000XL Top Side Resist Removal (TRR) Retrofit Kit	0004-00043

6000XL Tub Rinse Retrofit Kit 
This feature utilizes a series of solvent nozzles that keeps the sides of the process tub from acquiring a large buildup of process chemical. The feature may be programmed to rinse the tub after a programmed number of wafers or a set time interval. 
 

Description	Part No.
6000XL Tub Rinse Retrofit Kit	1346-0012-0001

6000XL Nozzle Rinse Retrofit Kit 
This feature utilizes a nozzle flush tube to maintain a solvent-rich environment around the dispense nozzle tip. This helps eliminate process chemical from drying which can become particulate transferred to the wafer surface. The dispense nozzle can also be flushed rinsed by a stream of solvent. The feature may be programmed to rinse the tub after a programmed number of wafers or a set time interval. 
 

Description	Part No.
6000XL Nozzle Rinse Retrofit Kit	1346-0012-0001

6000XL PE Process Tub Upgrade Kit 
The Process Tub Retrofit Kit provides a more ridged design then the standard 6000XL process tub. It features a Teflon base plate that mounts to the XL process module. The tub is supported across the bottom and on the sides by locating pins and is held in place with a locking ring. In this design the backside rinse nozzle has been removed from the tub and mounted on the spindle motor shaft. This means that it will remain in a fixed position when the tub is removed and replaced during housekeeping. 
 

Description	Part No.
6000XL Process Tub Upgrade Kit	0004-00041

---

System 6000 & 6000XL Kits 
 

Waste Bottle Level Sensor Kit 
This kit provides a capacitive sensor that monitors the liquid level in the Coater waste bottle. A high liquid level will place the Coater into "hold" and sound an alarm. Order one per Coater track. 
 

Description	Part No.
Waste Bottle Level Sensor Kit (6000)	501-40424-01
Waste Bottle Level Sensor Kit (6000XL)	501-40424-02

Indexer Capacitive Wafer Sensor Retrofit Kit 
Replaces optical or air type wafer sensors with a capacitive type. 
 

Description	Part No.
Indexer Capacitive Wafer Sensor Kit (6000XL Standard)	501-40481-01
Indexer Capacitive Wafer Sensor Kit (6000XL 3-Inch Indexer)	501-40481-02
Indexer Capacitive Wafer Sensor Kit (6000 Standard)	501-40481-03

Indexer Optical Wafer Sensor Retrofit Kit 
Replaces air type wafer sensors (System 6000) with a optical type. 
 

Description	Part No.
Indexer Optical Wafer Sensor Kit (6000)	501-39831-01

Emergency Shut Off Retrofit Kit 
This kit provides the emergency shut off capability to the System 6000 or 6000XL. 
 

Description	Part No.
EMO Retrofit Kit	501-39305-02

Non-Atomized Positive Develop Retrofit 
For systems with atomized type developer dispense systems, this kit adds a non-atomized dispense with surfactant pre-wet. One kit per track. 
 

Description	Part No.
Non-Atomized Developer Dispense	501-39709-01

Track Size Kits (6000 & 6000XL)